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Field & Spares Operations

We think that the best defense is a good offense.This means rigorous preventive maintenance, a ready supply of critical parts and well-trained field engineers who proactively engage with customers to anticipate problems, minimize downtime and enhance overall fab productivity.

Our customers' worldwide manufacturing facilities never sleep, so we make sure our support teams are at the ready 24/7/365. Our teams are supported by a sophisticated web-based infrastructure to assure quick response on field issues. An efficient pipeline of quality spares is available through our network of best-in-class suppliers. They're primed to get us the highest quality parts, on time, for all regions and at the most competitive cost.

From system installation, start-up, baseline calibration and wet clean, to technical training, spares and post-warranty service packages, our service organization is fully committed to total customer satisfaction.