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SHANGHAI, China and TAIPEI, Taiwan – March 16, 2015—Just two years after its market debut, Advanced Micro-Fabrication Equipment Inc.'s (AMEC) Metal Organic Chemical Vapor Deposition (MOCVD) platform, the Prismo D-Blue®, is gaining widespread acceptance by leading manufacturers of Light Emitting Diodes (LEDs). The fully automated four-chamber cluster tool is also being evaluated as a formidable mass-production system for power electronics devices, with advantages that match customers'performance expectations for state-of-the-art MOCVD systems. Five companies in China and Taiwan are collaborating with AMEC on their LED production equipment needs. One customer is already using the Prismo D-Blue in volume production, reporting superior performance and productivity, as well as cost-of-ownership benefits. Others are evaluating the system for 2- and- 4-inch wafer processing. The momentum reinforces AMEC's lead as China’s top provider of advanced production-worthy MOCVD tools, and demonstrates the competitiveness of the Prismo D-Blue in the global LED marketplace. 

AMEC's MOCVD technologists will share a technology update at LED Taiwan, Mar. 25-28. They will be present at Booth No. N0208.

Growing interest in the Prismo D-Blue reflects today's buoyant market for MOCVD tools following a challenging industry downturn. AMEC used the downturn to execute on a practical product-positioning strategy and deepen customer engagements. Now, the company intends to exploit the market trajectory which is expected to last through 2016, says research firm, Yole Developpement*. Yole expects the equipment market to peak at $580 million in 2015, with MOCVD reactors commanding more than 80 percent of the total. The highest demand is in China and Taiwan where manufacturers are buying new MOCVD reactors as they switch to 4-inch systems.

Dr. Zhiyou Du, Senior Vice President, COO and General Manager of AMEC's MOCVD Product Business Division called the product-positioning progress very encouraging. He noted, "We're pleased to be working so closely with customers in China and Taiwan, which, of course, is the center of gravity for LED production. We're confident that the Prismo D-Blue can help them meet their aggressive production targets without sacrificing margins."

To schedule an appointment with an AMEC MOCVD technologist at LED Taiwan, please contact Winnie Xiong at winniexiong@amecnsh.com.

About the Prismo D-Blue MOCVD Platform

The Prismo D-Blue MOCVD platform enables high-volume manufacturing of sophisticated GaN, InGaN and AlGaN ultrathin layered structures required for high-brightness LEDs. With precise parameter control, full automation and an unusually compact design, it's a new-generation MOCVD tool built for today’s LED manufacturing must-haves: high productivity, high yields and lowest possible cost-of-ownership. 

The patented architecture can accommodate up to four reactors. Each reactor can be controlled independently—an inventive design that enables exceptional manufacturing flexibility. It is the only tool of its kind with this capability. This means it can process in parallel or sequential mode, which reduces cross-contamination and ensures the high crystalline quality required for advanced LED applications.  The tool's footprint efficiency is unmatched—nearly 30 percent smaller than competitive single-reactor systems—making the Prismo a smarter fit for today's LED fabs. 

The Prismo platform can simultaneously process up to 232 2-inch wafers or 56 4-inch wafers. The processing capability will extend to 6 and 8-inch wafer production. Beyond the multi-reactor architecture configured for maximum process flexibility, the Prismo excels in every key performance category. With very little recipe adjustments throughout the entire epitaxial process, the tool consistently delivers breakthrough repeatability and excellent within-wafer and wafer-to-wafer uniformity. For a process with extreme sensitivity to chamber surface conditions, chemical environments, temperature shifts, and other variables, the repeatability performance is in a class of its own. 

Ultra-high reliability is also a key strength. Such reliability is enabled by in-situ, real-time monitoring of growth process parameters. It is also thanks to sophisticated software, advanced transfer modules, and process automation and control technologies– the same field-proven technologies that distinguish AMEC's semiconductor front-end processing tools.

Finally, the Prismo is optimized for easy maintenance - imperative in a fast-moving, cost-conscious LED production fab. Exceptional process performance and uptime extends the interval between services, while novel design features make servicing easier. Also, automated and programmable maintenance routines make reactor open/close operations safer, faster, predictable and less prone to error.

Special innovations embodied in the Prismo D-Blue MOCVD platform are protected by a portfolio of more than 100 patents (granted and pending). In addition, the tool follows semiconductor manufacturing disciplines and complies fully with SEMI standards.  

*Yole Developpement, LED front-end equipment market report, April 2014

Prismo D-Blue is a registered trademark of AMEC.


About Advanced Micro-Fabrication Equipment Inc. (AMEC)
AMEC is China's leading provider of advanced process technology to global semiconductor manufacturers and others in adjacent energy-related sectors. The company is an entrenched supplier of dielectric and TSV Etch tools, helping tier-one customers build devices at process nodes as low as 10nm.  Today the company has positioned more than 350 Etch stations at 30 leading-edge fabs across Asia.  AMEC's MOCVD tools have also been put into production for LED volume production in China.  To learn more about AMEC, please visit www.amec-inc.com.

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